Vacuum Spin Coater LVSC-A10 is a benchtop unit which can coat of maximum size 4 inch. It has adjustable speed maximum upto 10000rpm and 5 step control option. Brushless motor helps in easy operation
Request Quote| Maximum wafer diameter | 4 inch |
| Speed adjustable range | 100 to 10000 rpm adjustable |
| Acceleration range | 100 to 10000 rpm/s |
| Speed acceleration | 0.54166666666667 |
| Max single step time | 3000 s |
| Time resolution | 1s |
| Programmable control | 5 sets programmable control each sets with 5 steps |
| Motor | Brushless DC motor 75 W |
| Vacuum plate (chuck) | ≤ 100 mm (150 mm/200 mm/250 mm/300 mm etc optional) |
| Working voltage | AC 110V/220 V, 50/60 Hz |
| Dimension | 450 × 410 × 400 mm |
It is used for wafer and thin film coating
Main engine
Available Range :
Vacuum Spin Coater LVSC-A10 : 4 inchDownload catalog for
Vacuum Spin Coater LVSC-A10
